Clear quartz infrared tube 2700W

Fri, 05 Jun 2026 04:01:51 +0800

Out on the line, temperature drift isn’t a whiteboard problem. It shows up as linewidth variation, photoresist that won’t stick after soft bake, and yield hits that you feel at the end of the month. In lithography and photoresist processing, the bake step sets the thermal budget. If the hot zone can’t hold setpoint across the wafer, repeatability falls apart. What we built around We designed the 2700W Clear quartz infrared tube around one thing: stable heat where the process needs it. Quartz transmits short-wave infrared cleanly, so response is fast and control stays tight. The 2700W rating gives you the power density to recover quickly after door cycles without overshoot. Across the heated area, we target wafer-level uniformity within ±0.1°C, so critical dimensions stay in spec run after run. Why it holds up in production This tube drops straight into the thermal stack for soft bake and hard bake stations, helping keep photoresist profiles consistent and giving you more margin on defects. It runs in cleanrooms from Class 1 to Class 100 with low outgassing and no particle generation, so you’re not fighting particle counts on the wafer. The payoff is better process tolerance, fewer excursions, and maintenance intervals you can plan around. Energy stays disciplined, too, because the tube heats on demand with minimal standby loss. What to watch for Clear quartz performs, but it needs respect. Handle it with clean gloves and use Class-rated fixtures—otherwise you risk surface contamination. Match reflector geometry and airflow to the tube; if you don’t, hot spots and uneven uniformity will creep back in. Plan for thermal-mechanical stress in the mount. Thermal expansion is real, and misalignment will make uniformity drift over time.

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Clear quartz infrared tube 2700W