Dealing with Heat in Semi Fab Lamps Here’s the thing about infrared (IR) radiation in a fab: if you don’t keep it in check, it’s a nightmare. It...

On the fab floor, you don’t get a second chance when the bake drifts half a degree. A 0.5°C swing during photoresist bake can move critical...

Out on the line, temperature drift isn’t a whiteboard problem. It shows up as linewidth variation, photoresist that won’t stick after soft bake, and...